Chang-Koo Kim

Professor

Office: Department of Chemical Engineering and and Department of Energy System Research, West Hall 202, Ajou University.

Tel: +82-31-219-2389

E-mail: changkoo@ajou.ac.kr

Research Interest

Plasma processing (etching and deposition)
Mechanism and chemistry of ion-surface interaction
Plasma etching for multi-directional oblique profiles

Education

1988.03-1992.02 Department of Chemical Engineering, Seoul National University (B.S)
1992.03-1995.08 Department of Chemical Engineering, Seoul National University (M.S)
1996.08-2000.12 Department of Chemical Engineering, University of Houston (Ph.D)

Work Experience

2001.01-2002.02 Senior Process Engineer, Novellus Systems (San Jose, CA)
2002.03-2006.02 Assistant Professor, Department of Chemical Engineering, Ajou University
2006.03-2011.02 Associate Professor, Department of Chemical Engineering, Ajou University
2011.03-Present Professor, Departmnet of Chemical Engineering, Ajou University